Dynamic load analysis and design methodology of LCD transfer robot

Abstract

The objective of the present study is to develop a design methodology for the large scale heavy duty robot to meet the design requirements of vibration and stress levels in structural components resulting from exposure of system modules to LCD (Liquid Crystal Display) processing environments. Vibrations of the component structures significantly influence the motion accuracy and fatigue damage. To analyze and design a heavy duty robot for LCD transfer, FE and multi-body dynamic simulation techniques have been used. The links of a robot are modeled as flexible bodies using modal coordinates. Nonlinear mechanical properties such as friction, compliance of reducers and bearings were considered in the flexible multi-body dynamics model. Various design proposals are investigated to improve structural design performances by using the dynamic simulation model. Design sensitivity analyses with respect to vibration and stresses are carried out to search an optimal design. An example of an 8G (8th-Generation) LTR (LCD Transfer Robot) is illustrated to demonstrate the proposed methodology. Finally, the results are verified by real experiments including vibration testing.