Abstract

We develop the online process parameter design (OPPD) framework for efficiently handling streaming data collected from industrial automation equipment. This framework integrates online machine learning, concept drift detection and Bayesian optimization techniques. Initially, concept drift detection mitigates the impact of anomalous data on model updates. Data without concept drift are used for online model training and updating, enabling accurate predictions for the next processing cycle. Bayesian optimization is then employed for inverse optimization and process parameter design. Within OPPD, we introduce the online accelerated support vector regression (OASVR) algorithm for enhanced computational efficiency and model accuracy. OASVR simplifies support vector regression, boosting both speed and durability. Furthermore, we incorporate a dynamic window mechanism to regulate the training data volume for adapting to real-time demands posed by diverse online scenarios. Concept drift detection uses the EI-kMeans algorithm, and the Bayesian inverse design employs an upper confidence bound approach with an adaptive learning rate. Applied to single-crystal fabrication, the OPPD framework outperforms other models, with an RMSE of 0.12, meeting precision demands in production.

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