Abstract

Optical measurement of acoustic motion at a surface is usually accomplished with a scanning point probe. A full-field view acoustic imaging microscope is described that records subnanometer displacement amplitude and phase over a surface without scanning. Images are recorded at video frame rates and heterodyne principles are used to allow operation at any frequency from Hz to GHz. Fourier transformation of the acoustic displacement image provides a mapping of excited mode wavenumbers at any frequency. This method readily measures (a) the acoustic displacement of transducers, (b) acoustic bulk wave reflection from subsurface objects in solids and liquids, (c) resonant ultrasound vibration modes of complex shapes, (d) surface acoustic waves, and (e) plate wave modes in isotropic and anisotropic materials. These and other examples are presented along with discussion and analysis for characterizing material properties, such as physical dimensions, material elastic properties, crystal orientation, electromechanical coupling, and the identification and visualization of defects.

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