Dynamic Failure of Multi-layer MEMS at High Loading Rates: Experiments and Simulations

Abstract

Abstract : Microelectromechanical Systems (MEMS) are increasingly used in critical military applications involving high loading rate for which failure modes can develop that are not present under static loading. We focused on understanding the dynamic failure response of multilayer MEMS at the material and structural scales. Findings/significance: We have performed static and dynamic failure experiments on polysilicon, and on Au and PZT/metal MEMS (from Army Research Laboratory.) The effects of loading rate, material, and geometry were studied. Findings show that failure modes are highly dependent on loading rate and geometry, and include material failure, structural failure or delamination. In addition, MEMS response mayMicroelectromechanical Systems (MEMS) are increasingly used in critical military applications involving high loading rate for which failure modes can develop that are not present under static loading. We focused on understanding the dynamic failure response of multilayer MEMS at the material and structural scales. Findings/significance: We have performed static and dynamic failure experiments on polysilicon, and on Au and PZT/metal MEMS (from Army Research Laboratory.) The effects of loading rate, material, and geometry were studied. Findings show that failure modes are highly dependent on loading rate and geometry, and include material failure, structural failure or delamination. In addition, MEMS response may