Abstract
Facing IC packaging, a high speed precision positioning x-y table with new elastic decoupling mechanism is developed based on the voice coil actuator (VCA) direct driving. The small moving mass makes it possible that the positioning table moves at high speed and precision. The decoupling theory is expatiated. By use of the FEA and dynamic simulation method, the dynamic characteristics of the high speed table are studied. Based on the dynamic response of rigid and elastic body, the spring as the key component in the decoupling mechanism is investigated. The influence of the flexibility of hinge to the spring stiffness and preload is discussed in detail, and the influence of the spring stiffness and preload to the positioning table is also given. At last, the matching law of the spring stiffness and preload is presented. The achieved results would be helpful to the dynamic design of the kind of manufacturing equipment. All design parameters achieved and the design theory also proved its correctness in the precision experiment.
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