Abstract
The performance of grooved air bearings in microsystems is analysed and discussed. The modified molecular gas lubrication (MMGL) equation is utilized as the governing equation for the gas film to include the effect of gas rarefaction. The gas rarefaction is significantly affected by two important parameters (Knudsen numbers ( Kn) and accommodation coefficients (ACs)). The Poiseuille and Couette flowrate correctors ( QP and QC) are introduced in the MMGL equation to extend the lubrication theory (compressible Reynolds equation) for arbitrary Kn and tangential momentum accommodation coefficients or ACs. At a specific operating condition, the transient MMGL equation is linearized by small variations in film thickness and pressure. The linearized MMGL equation is then solved by finite-element method to obtain the dynamic pressure distributions. Therefore, the dynamic coefficients (stiffness and damping coefficients) are obtained by integrating the dynamic pressure over the bearing surfaces.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
