Abstract
This research focuses on the diaphragm design of the graphene MEMS capacitive microphone. Simulation part will be first involved in order to get the optimum dimensions of each elements by COMSOL multiphysics simulation software. This study will discussed on mechanical behavior of graphene diaphragm for MEMS capacitive microphone. First stage will implicated a theoretical model of diaphragm MEMS capacitive microphone. Then, boundary element based simulation with some mathematical formula will be used to design and evaluate the model. The output value of selective parameters such as the thickness and diameter of diaphragm, air gap and others are crucial in order to further fabricate the MEMS capacitive microphone. The proposed design of graphene diaphragm are in circular shape and square shape. The mechanical sensitivity of diaphragm with the pressure changes will be the crucial parameters in early stage. The results revealed that the circular shape diaphragm shows the better deflection with the thicker diaphragm gives the lower deflection. Von mises stress for both diaphragm shape also recorded in order to avoid the failure of the proposed design.
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