Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading

Abstract

In this paper flexural vibrations of an electrostatically actuated cantilever microbeam in an incompressible inviscid stationary fluid have been studied. By applying “Three dimensional aerodynamic theory” pressure jump across the microbeam has been investigated and the inertial effects of fluid on microbeam dynamics have been modeled as a mass added to microbeam mass. Magnitude of the added mass has been calculated for various aspect ratios of cantilever microbeams and compared with those of clamped-clamped microbeams. To investigate the dynamic characteristics, it has been considered that the microbeam has been deflected by a DC voltage, V DC and then the dynamic characteristics and forced response of the system have been considered about these conditions. Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been applied to solve the nonlinear static and dynamic governing equations, respectively. Water by neglecting viscidity effects, as an instant has been considered as a surrounding fluid and the frequency response of the microbeam has been compared with that of vacuum conditions. It has been shown that because of the added mass effects in watery environment, the natural frequencies of the microbeam decrease. Because of the higher dielectric coefficient and increasing electrical stiffness and decreasing total stiffness consequently, maximum amplitude of the microbeam vibrations increases in watery environment, compared with vacuum. Moreover, it has been shown that increasing the DC voltage, increases the electrical stiffness and maximum amplitude of the microbeam vibrations, consequently, It has been shown that in higher voltages (near pull-in voltage), the rate of variation of resonance frequency and maximum amplitude is stronger than lower voltages.