Abstract
The dynamic behaviour for nanoscale electrostatic actuators isstudied. A two parameter mass-spring model is shown to exhibit abifurcation from the case excluding an equilibrium point to the caseincluding two equilibrium points as the geometrical dimensions of thedevice are altered. Stability analysis shows that one is a stable Hopfbifurcation point and the other is an unstable saddle point. Inaddition, we plot the diagram phases, which have periodic orbitsaround the Hopf point and a homoclinic orbit passing though theunstable saddle point.
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