Abstract
To study the dynamic performance and control strategy of a kind of high speed precision positioning XY table with a new kind of decoupling mechanism, the electromechanical co-simulation model with three closed-loop control system using proportional–integral–derivative controller (PID controller) is constructed. By use of finite element analysis (FEA) and co-simulation method, the preloaded spring as the key component in the decoupling mechanism is optimized. The matching law of the spring stiffness and preload is presented. The decoupling mechanism influence on the dynamic performance of the XY table during the movement is fully discussed. Based on the electromechanical model, a three closed-loop control scheme with disturbance observer and feed-forward controller is proposed. Co-simulation results demonstrate the validity of the control strategy.
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