Abstract
Multi wire saw is the important basis of integrate circuit, optoelectronic, photovoltaic industry, and it becomes a promising technology for semiconductor wafer production because of its advantage of slicing large ingot into thin wafers with high efficiency and good quality. In the process of moving, the inevitable wiresaw vibration is directly related to the whole process with both benefit and harm. This paper analyses the wire vibration behavior in cutting area, the dynamic model is built by modeling the interaction between the dynamics of wire and hydrodynamic characteristics of slurry flow, available modal analysis provides closed form expressions for the steady state response, obtain the vibration of wire subject to different process parameters on wire saw manufacturing process.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
