Abstract
In this paper, the dynamic features of an electrostatic energy harvester with out-of-the-plane gap closing scheme has been studied with different stopper heights and surface potentials. The displacement and output power of the devices with various stopper heights have been simulated, measured and analysed and “pull-in” effect has been considered. The “pull-in” effect is observed for device with high surface potential, which limits the output power. And a decrease of output power for device with higher stoppers and same gap and acceleration is also noticed, which is different from the phenomenon observed previously. The dynamic analysis of the device will facilitate the design of electrostatic vibration based energy harvesters.
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