Abstract

Abstract This paper studies the dynamic behavior of Cylindrical Ultrasonic Motor (CUSM) under the external excitation of two sinusoidal voltage signals. Such a study is useful for designing effective servo control scheme for the CUSM. In particular, it is important to understand how the output speed is related to the three possible control inputs—voltage amplitude, driving frequency and phase difference of the two excitation voltage signals. In this paper, the Timoshenko beam model and mode-summation method are used to analyze the dynamic response of the lead zirconate titanate (PZT) stator tube of the CUSM under external excitation. Then, the input–output relations between the speed output and control inputs are established. Finally, the validity of this theoretical analysis is verified experimentally.

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