Dynamic Analysis of a Maglev Conveyor Using an EM-PM Hybrid Magnet

Abstract

With the emergence of high-integration array and large area panel process, the need to minimize the generation of particles in the field of semiconductor, LCD and OLED has grown. As an alternative to the conventional roller system, a contactless magnetic conveyor has been proposed to reduce the generation of particles. An EM-PM hybrid which is one of magnetic levitation types is already proposed for the conveyor system. One of problems pointed out with this approach is the vibration caused by the dynamic interaction between conveyor and rail. To reduce the vibration, the introduction of a secondary suspension system which aims to decouple the levitation electromagnet from the main body is proposed. The objective of this study is to develop a dynamic model for the magnetically levitated conveyor, and to investigate the effect of the introduced suspension system. An integrated model of levitation system and rail based on 3D multibody dynamic model is proposed. With the proposed model, the dynamic characteristics of maglev conveyor system are analyzed, and the effect of the secondary suspension and the stiffness and damping are investigated.