Dust as fine electrostatic probes for plasma diagnostic

Abstract

Here we present a novel use of fine dust for diagnostic measurements in the sheath of a planar rf discharge and in the inertial electrostatic confinement (IEC) plasma. Since dust charge is a function of a number of plasma parameters, and the dust charge adjusts itself to changes in plasma conditions instantaneously, dust particles may be used as an ideal diagnostic tool. A major advantage of such a diagnostic approach is its simplicity as the only measurement of a position of a dust particle or its motion after a perturbation is necessary. This technique only requires access to a discharge chamber, dust particles, a laser to illuminate them and a camera to capture the motion of the dust. The dependences of the sheath profiles on the discharge pressure and power have been determined. The radial potential profiles in a cylindrically-symmetrical capacitively-coupled rf discharge and in an IEC plasma were obtained. The direction of the ion flux in the radial IEC discharge was found.