Abstract
A duplex plasma immersion ion implantation and deposition (PIIID) process, involving carbon ion implantation and diamond-like carbon (DLC) film deposition, is proposed to treat the inner surface of a tube. Samples of 2Cr13 martensite stainless steel were placed inside the tube to investigate the performance of the films. Carbon ion implantation was finished by biasing the tube with a high voltage, and the DLC film deposition was obtained by biasing the tube with a medium voltage. Raman spectrum, ball-on-disc, indentation and scratch tests were used to investigate the structure, tribological property and adhesion strength of the as-deposited films. The Raman spectrum shows that the sp 3 bonding is formed in the as-synthesized film. Tribological and scratch test results reveal that the duplex DLC coating with the implantation time of 1 h has the largest adhesion strength and the best wear resistance.
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