Dual-scaled stable superhydrophobic nano-flower surfaces

Abstract

Novel dual-scaled superhydrophobic nano-flower surfaces were fabricated by 1-mask photolithography, DRIE and Carbon nanotube (CNT) Microwave Plasma Enhanced CVD (MPCVD). Patterned structure was characterized by SEM, TEM and AFM techniques. With the additional petal-like CNT structure, the apparent contact angle (ACA) increased dramatically compared with silicon (∼140%) and parylene-coated (∼78%) micropillar surfaces and resulted in a small sliding angle (around 5°). The sliding angle and dynamic testing indicate that these nano-flower surfaces are stable superhydrophobic surfaces.