Abstract
In this paper, an oscillator technology with high-Q MEMS resonator as its tank circuit is presented to validate its key functionality as a stable frequency reference across a wide spectrum of frequencies. Particularly, a piezoelectrically-transduced contour-mode MEMS resonator is strategically designed to operate at two distinct layout-defined mechanical modal frequencies (259.5MHz and 436.7MHz). These devices were characterized and modeled by an extracted equivalent LCR circuit to facilitate the design of the oscillator using a standard circuit simulator. For this preliminary study, the MEMS resonators have been integrated with the sustaining amplifier circuit at PCB level using wire-bonding technique and coaxial connectors. As shown by the time-domain measurements, these oscillators are capable of selectively locking into the resonance frequency of the constituent MEMS resonator to generate a stable sinusoidal waveform with peak-to-peak amplitude of 4.6V at 259.5 MHz and 2.3V at 436.7 MHz, respectively. Meanwhile, the fundamental oscillation frequency and it harmonics can be easily observed in a measured frequency-domain spectrum.
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