Abstract
We developed a novel piezoelectric microactuator for dual-stage actuator systems in magnetic disk drives. This microactuator is based on the shear deformation of piezoelectric elements, and drives the head suspension assembly. The actuator is suitable for thin devices, and is easily manufactured because of its simple stack configuration. We installed the microactuator in a 2.5 prototype drive, and evaluated the servo system of the dual-stage actuator. This paper describes the structure of our piezoelectric actuator, its mechanical characteristics, and the evaluation of the dual-stage actuator servo system.
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