Dual spiral sandwiched magnetic thin film inductor using Fe–Hf–N soft magnetic films as a magnetic core

Abstract

Dual spiral sandwiched magnetic thin film inductors are fabricated using as-deposited Fe–Hf–N soft magnetic thin films. The hard axis of the magnetic film is aligned transverse to the direction of coil conductor current, which is expected to result in high inductance values as well as excellent frequency response. The inductance, Q factor and resistance are measured using impedance analyzer from 1 to 10 MHz. The inductance of fabricated thin film inductors are obtained within the range of 1.1–1.5 μH. Also, the quality factor and coil resistance is obtained in the range of 3–38 at 8 MHz and 1–2.5 Ω, respectively.