Abstract
Currently, no reliable electrolyte concentration monitoring method exists for ultra-short pulsed electrochemical micromachining. A dual-sensing system for electrolyte concentration monitoring is proposed in this work. An inductance element is added into the classical pulsed electrochemical micromachining circuit system. For it, a modified circuit equation is proposed by which the coupled electronic and ion circuit is analyzed, and two modes of the coupled circuit are found. The asynchronous mode is used to monitor the concentration changes of the ions in electromechanical micromachining, and a novel method of electrolyte concentration monitoring is obtained. Combining this method with the short-circuit frequency monitoring method, an electrolyte concentration monitoring method based on the dual-sensing monitoring system is proposed, and corresponding monitoring software is produced. The software is used in actual microstructure processing experiments, obtaining nanometer-scale machining accuracy.
Highlights
Electrochemical machining (ECM) technology using ultrashort pulses was proposed by Schuster et al [1], and developed using the results obtained from the tip electrode of the microscope [2], [3]
The asynchronous mode is used to monitor the concentration changes of the ions in electromechanical micromachining. Combining this monitoring method with the short-circuit frequency monitoring method, an electrolyte concentration monitoring method based on the dual-sensing monitoring system is proposed, and the corresponding monitoring software is produced
MONITOR ION CONCENTRATION CHANGE BASED ON DOUBLE SENSOR SYSTEM In order to ensure the reliability of the concentration monitoring system in the electrochemical micromachining process, a dual-sensing concentration monitoring system based on peak time sensing and short-circuit frequency sensing was constructed
Summary
Electrochemical machining (ECM) technology using ultrashort pulses was proposed by Schuster et al [1], and developed using the results obtained from the tip electrode of the microscope [2], [3]. Tool cathode vibration technology was used to increase the machining quality of the produced microelements [11]. Novel control circuits of the micromachining system were proposed to increase the machining accuracy of the technology [12]–[14]. The tool electrode short-circuit frequency monitoring method was used to monitor the operation state of the machining system for ensuring the processing quality of the ECM technology [18]–[22]. The asynchronous mode is used to monitor the concentration changes of the ions in electromechanical micromachining Combining this monitoring method with the short-circuit frequency monitoring method, an electrolyte concentration monitoring method based on the dual-sensing monitoring system is proposed, and the corresponding monitoring software is produced. Oscilloscope, where the response signals were fed into a computer for display (see Fig. 2)
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