Abstract
In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR FET sensor, and only a minor effect on the FBAR sensor. In this dual-mode system, qualitative discrimination can be achieved by analyzing polarity with the Si-NR FET and quantitative concentration information can be obtained using a polymer-coated FBAR with a detection limit at the ppm level. The complementary performance of the sensing elements provides higher analytical efficiency. Additionally, a dual mixture of two types of freons (CFC-113 and HCFC-141b) is further analyzed with the dual-mode gas sensor. Owing to the small size and complementary metal-oxide semiconductor (CMOS)-compatibility of the system, the dual-mode gas sensor shows potential as a portable integrated sensing system for the analysis of gas mixtures in the future.
Highlights
Micro sensors are small-sized devices with flexibility, high sensitivity, moderate cost, and reduced power consumption
Our results suggest that the proposed dual-mode gas sensor has potential for the quick and accurate detection of CFC-113 and HCFC-141b, as well as other dual-component gas mixtures, in the future
Real-time sensing data of both sensors were recordedlight by a illumination was performed after each towas induce freon molecules keep personal computer (PC)
Summary
Micro sensors are small-sized devices with flexibility, high sensitivity, moderate cost, and reduced power consumption. A field effect transistor (FET) is a type of electrochemical sensor which offers charge-based information, such as the dipole moment inherent in analytes. Rapid progress has been made in the field of gas sensing using thin film bulk acoustic resonators (FBARs) [25,26,27,28,29] Due to their GHz-level resonant frequency and high quality-factor, FBARs show higher sensitivity than conventional acoustic wave devices [30,31]. We fabricated p-type Si-NR FETs as well as 2.44 GHz FBAR sensors, and incorporated these two types of sensors into a dual-mode gas sensing system for the analysis of CFC-113 and HCFC-141b. Our results suggest that the proposed dual-mode gas sensor has potential for the quick and accurate detection of CFC-113 and HCFC-141b, as well as other dual-component gas mixtures, in the future
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