Dual-jump amplification in an electric-thermal adjusted arch beam micro-resonator

Abstract

Amplitude amplification can improve signal-to-noise ratio, which is of great significance in engineering systems, especially in small-scale MEMS systems. Hesre, we report an approach for achieving amplification of both amplitude and frequency bandwidth using the dual-jump effect in an electric-thermal adjusted arch beam micro-resonator. Through the electrothermal adjustment of an arch beam body, dual-jump in the amplitude-frequency response is observed, where the amplitude and frequency bandwidth of the response of the nonlinear resonator are both instantly amplified. The amplified frequency bandwidth can be greatly regulated by the driving voltage, which provides a novel strategy for sensing or filter applications capitalizing on the intrinsic nonlinear phenomena of micromechanical resonators.