Abstract
The morphological (TEM) and chemical (XPS, ARXPS) characterizations of fluoropolymer films modified with palladium particles (CFx(Pd)) are reported in this article. The films, which have different levels of metal content, have been deposited by ion beam co-sputtering a Teflon target and a palladium one. Composite films with a thickness of a few nanometers have also been deposited and analyzed. For all degrees of thickness, the analyses show the fluoropolymer nature of the hosting material, the nanoscopic character of metal domains, and their uniform distribution in the polymer matrix. The likely application of this ion sputter-deposited material in the sensor field has also been preliminary tested.
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