Abstract
The presented dual-drive long-travel precise positioning stage is employed in grating ruling engine and capable of extended travel and high precision. Based on the characteristic of grating ruling engine, a dual-drive positioning system is developed. The primary positioning stage is an open-loop system and designed to obtain long-travel range. The secondary positioning stage with a control system can guarantee the positioning precision being less than 10 nm. After modeling the fine positioning system, a single-neuron-based PID controller is employed to implement the control system. The experiment results demonstrate that in the long-travel mode, the stage is capable of performing positioning with an extended move range and accuracy being less than 10 nm. Meanwhile, in the short-travel mode, the stage performs positioning with a limited range of 120 μm and accuracy being less than 7 nm. The main sources of the positioning deviation including clearance, vibration, and the measurement error are analyzed in detail.
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