Abstract
Quantitative assessment of critical dimensions of sub-wavelength structures, dark-field and bright-field modes of operation, recognition of nonpatterned anisotropic surfaces, and three-dimensional profiling of opaque and transparent samples are the new features of a super-resolution dual-channel heterodyne microscope that was introduced in a previous publication in this journal. The aforementioned modes of operation can be activated by simple rotation of a polarizer or insertion of a polarization-separating prism. Various experimental results are presented, demonstrating new performance capabilities of the heterodyne microscope.
Published Version
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