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Abstract
A dual-axis micromechanical probe that combines a double cantilever and torsion beams is presented. This probe can reduce the mechanical cross-talk between the lateral and vertical forces and detect dual-axis forces by measuring the dual-axis displacement of the probe end using the optical lever-based method used in conventional friction force microscopes. By reducing the cross-talk, this new probe design yields improved frictional force measurements for the identification of materials.
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