Abstract

Transparent lead zirconium titanate (PZT) thin film is suitable for a variety of electro-optic application, and the increasing of the electro-optic coefficient of PZT film is one of the important factors for this application. In this study, the main processing variable for improving an electro-optic coefficient was the drying temperature: 300, 350, 450 and 500°C in sol-gel derived PZT thin films. The highest linear electro-optic coefficient (1.65×10 −10 (m/V)) was observed in PZT film dried at 450°C. The PZT film showed the highest perovskite content, polarization ( P max=49.58 μC/cm 2, P r=24.8 μC/cm 2) and dielectric constant (532). A new two-beam polarization ( TBP) interferometer with a reflection configuration was used for electro-optic testing of PZT thin films which allows measurement of the linear electro-optic coefficient of thin film with strong Fabry–Perot (FP) effect usually present in PZT thin film.

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