Dry Etching with Nanoparticles: Formation of High Aspect-Ratio Pores and Channels Using Magnetic Gold Nanoclusters.

Abstract

Methods for generating nanopores in substrates typically involve one or more wet-etching steps. Here a fundamentally different approach to produce nanopores in sheet substrates under dry, ambient conditions, using nanosecond-pulsed laser irradiation and magnetic gold nanoclusters (MGNCs) as the etching agents is described. Thermoplastic films (50-75 µm thickness) are coated with MGNCs then exposed to laser pulses with a coaxial magnetic field gradient, resulting in high-aspect ratio channels with tapered cross sections as characterized by confocal fluorescence tomography. The dry-etching process is applicable to a wide variety of substrates ranging from fluoropolymers to borosilicate glass, with etch rates in excess of 1 µm s-1 . Finite-element modeling suggests that the absorption of laser pulses by MGNCs can produce temperature spikes of nearly 1000 °C, which is sufficient for generating photoacoustic responses that can drive particles into the medium, guided by magnetomotive force.