Abstract
Recently, many micromachined vibratory gyroscopes are proposed. Almost all the devices have been made efforts to obtain the double resonant mode in order to improve the sensitivity of micro gyroscopes. Nevertheless, there are some difficulty to obtain the accurate structure for consistent resonant frequencies between reference vibration and detection vibration in fabrication steps. In this paper, we show the design strategy of the high sensitive vibratory gyroscope using the hard spring effect positively. We propose the method for adjusting vibrating frequency and show the example of the actual device and some measured data for high performance devices.
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