Drilling of micron-scale high aspect ratio holes with ultra-short pulsed lasers: Critical effects of focusing lenses and fluence on the resulting holes’ morphology

Abstract

Micro drilling employing ultra-short pulsed lasers is a promising manufacturing technology for producing high aspect ratio holes, particularly on ceramic substrates due to the growing range of application in electronic industry. Controlling the morphology and quality of the holes is an important factor in fulfilling the requirements of such applications. In this research, the effects of a wide fluence spectrum associated with the use of femto-second lasers on achievable aspect ratios were investigated by employing lenses with different focal distances. The holes’ morphology and quality were analysed utilising a high resolution X-ray tomography (XCT). It was demonstrated that the achievable aspect ratio can be increased from 3 to 25 just by varying the lenses focal distances. In addition, the quality of produced holes in terms of taper angle and cylindricity was investigated and the results showed that the quality would be improved by increasing the fluence and/or decreasing the focal distance. At the same time, the limitations of drilling holes with low focal distance lenses were discussed, i.e. sensitivity to defocusing and increased risks of recast formations inside the holes and bending effects, that should be considered in designing processes for high aspect ratio percussion drilling.