Abstract
Due to relatively low responsivity at near infrared (NIR) wavelengths, surface-illuminated silicon (Si) photodiodes (PDs) are not attractive for ultra-fast data communication applications despite their CMOS-compatibility. Metal-semiconductor-metal (MSM) photodiodes are well-known for simplicity in fabrication compared to pin and pn junctions-based counterparts, but they usually work with lower efficiencies due to thin absorption layer that ensures high speed response. In this letter, we demonstrate a high efficiency and high-speed Si MSM PD with innovative photon-trapping surface structures. These wavelength-scale structures decrease the surface reflection and introduce laterally propagating waves parallel to the semiconductor surface. The responsivity of Si MSM PDs with the photon-trapping holes was measured to be ~0.59A/W, while the control devices without holes show ~0.08A/W. Such PDs with $50\mu \text{m}$ diameter and with 1 $\mu \text{m}$ finger spacing provide a pulse response of 60ps and 38ps full-width at half-maximum (FWHM) at 3V and 10V applied bias, respectively. Surface-illuminated PDs with these dimensions can offer easy optical coupling options for fiber optic links while offering complete CMOS compatibility.
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