Abstract

This paper presents the main results of our study on the low‐frequency noise characteristics of ultrathin oxide gate oxide MOSFETs representative of several sub 90 nm CMOS technologies. Simple analytical models for this device are presented and used for interpretation of noise measurements. For the noise data interpretation, a simple drain and gate current noise model based on a flat band voltage fluctuation concept are developed and were shown to account for the overall drain current and gate current noise behavior.

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