Abstract
More and more AFMs and AFM profilers will be used to quantify micro- and nanostructures. For a correct characterization and evaluation of the measured structural details, in the nanoscale range, knowledge of the current shape of the AFM tip is needed. Often, the interaction between the AFM tip and the sample leads to a change in the tip shape. Our concept for the determination of tip shapes is based on the measurement of a well-known sharp-edged silicon structure. Each calibration sample contains a selected structure serving as a calibrated width standard, and has a certified pitch. Consequently, the shape of AFM tips can be determined with an accuracy of 10 nm.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Applied Physics A: Materials Science & Processing
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
