Double-scatter Mueller matrices for vector electromagnetic scattering from single grooves and lines on a silicon surface

Abstract

A recently developed numerical method is used to calculate the single- and double-scattered Mueller matrices for scattering of vector-electromagnetic waves from rough surfaces. Calculations are performed for the case of a single groove and a single rib on a silicon surface and results are compared to the published experimental results. The calculated results show good agreement with the experimental results for the groove case and poorer agreement with the rib case, probably due to errors in the experimental construction of the rib. It is found that, for the cases studied here, variations of the sign with scatter angle in individual Mueller matrix elements are associated with the presence of double- (or multiple-)scattered light, as has been found previously for scalar diffraction calculations in Gaussian randomly rough surfaces.