Abstract
The effect of the high-energy electron flux on double probe characteristics is investigated theoretically and practically. Double probe characteristics are measured in a microwave-excited surface-wave plasma. One of the probes is directly exposed to the high-energy electron flux and the asymmetric double probe characteristics are measured. The ordinary double probe theory is modified in order to estimate the electron flux energy. Applied modifications of the theory consist of additional high-energy electron flux current flowing to one of the probe and the assumption of the probe potential dependence on bias voltage. The results obtained from the measured double probe characteristics correspond well to results obtained using a single Langmuir probe and retarding field analyzer.
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