Abstract
Fano resonance effect has potential applications in many nanophotonics devices, Such as switch, sensor, and modulators. To realize double Fano resonance effect, in this paper, we present a novel coupling mechanism in a multi-layer metamaterial structure. The structure consists of periodic TiO2 grating covered with MgF2-TiO2-Ag multilayer with a MgF2 substrate. Results show that one of the two Fano resonance is caused by the interference between a broad Fabry-Perot (FP) mode and a dark waveguide mode (WG), and the other Fano resonance is caused by the asymmetric waveguide mode of the MgF2-TiO2-Ag layer. The effect of structural parameters on transmission is also studied, the field distribution of the proposed nanostructure is presented to illustrate the mechanism. We achieve a refractive index sensitivity of 73.5 nm/RIU, and temperature sensitivity of 0.0915nm/°C, the ultra-narrow transmission bandwidth leads to the high FOM*. The results will pave the way towards the design of double band Fano resonance, which may have potential application in high signal-to-noise ratio measurement, plasmonic modulator and refractive index sensor or temperature sensor.
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