Double-Barrier β-Ga2O3 Schottky Barrier Diode With Low Turn-on Voltage and Leakage Current

Abstract

This work reports a $\beta $ -Ga2O3 double-barrier Schottky barrier diode (DBSBD) with both low turn-on voltage and low reverse leakage current by using Ni and PtOx as the anode electrode. The barrier height of PtOx-based diode can be effectively modulated from 1.26 to 1.62 eV by adjusting oxygen pressure during sputtering processes. Combining the maximum work function of PtOx electrode with the optimization of the electrode ratio of Ni and PtOx, the DBSBD with an electrode diameter ratio of $\text{D}_{\text {Ni}} /\text{D}_{\text {PtOx}}= {75}/{150} \mu \text{m}$ not only exhibits a high forward current of 470.9 A/cm2 (at 3.5 V), a low on-resistance of 4.1 $\text{m}\Omega ~\cdot $ cm2 and a low turn-on voltage of 1.13 V, but also possesses a relatively low reverse leakage current of ${1.2}\times {10}^{-{7}}$ A/cm2 (at −100 V), which is more than one order of magnitude lower than that of the Ni-SBD. Silvaco TCAD simulation reveals that such optimization can be attributed to the suppression of edge leakage current due to the double-barrier contact. Therefore, the strategy of double-barrier design can balance the forward and reverse characteristics in SBD, providing a new device structure for advanced power electronics.