Abstract
Abstract Among other parameters which influence various processes associated with ion bombardment of solids (such as sputtering, secondary electron emission, ion scattering and so on) there is “ion dose”. As the ion dose the product of ion current density (or total ion current) and time of irradiation is usually accepted. However, this definition is valid in such cases only when the time interval required for the actual experiment (or for the actual measurement) is small as compared with a certain time interval (relaxation time) which may be approximately determined as the bombarded ion penetration depth divided by the velocity of the irradiated surface motion due to target sputtering. The examination of the situations which take place in typical ion bombardment experiments (ion current densities of about 0.01–1.00 ma/cm2, sputtering ratios of about 1–10 at/ion) shows that the relaxation time turns out to be of the order of some minutes to some seconds depending strongly, in particular, on the crystalline...
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