Abstract

β-Ga2O3 is a promising material for advanced optoelectronic semiconductors due to its wide bandgap and high breakdown voltage. However, achieving efficient p-type doping remains a challenge. This investigation employs high-throughput (HT) first-principles calculations to explore doping effects in β-Ga2O3 systematically. The results of HT first-principles calculations indicate that changes in the Fermi levels (EF) can reflect the type of dopant elements. We systematically evaluated nine candidate dopants using GGA+U calculations. Through analysis of the (0/−1) transition levels, the ability to form shallow acceptors gradually decreases in the order of Zn, Mg, Cu, Hg, and Ag. Interestingly, due to the GGA+U optimization process considering electron correlation and localization effects, Mg-doped β-Ga2O3 exhibits an impurity level near the conduction band minimum (CBM), contributed by Mg2p and O2p orbitals. Mulliken population analysis reveals that Cu exhibits the highest charge density after doping compared to Hg, Zn, and Mg. Additionally, Ag-doped β-Ga2O3 shows potential for UV device applications within the 200 nm to 280 nm spectrum. The insights from this study delineate effective p-type doping strategies for β-Ga2O3, contributing to the advancement of optoelectronic device development involving semiconductors.

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