Abstract
Dopant-free, transparent ZrO2 with a monoclinic structure was successfully developed through a two-step oxidation process by combining heat treatment in air and under a low oxygen partial pressure, using a Zr metal foil. The transmission of the sample was ~50% at 600 nm (in the region of visible light) and over 60% beyond the near-infrared region. This transparent ZrO2 with a monoclinic structure comprised equiaxed grains with dimensions of tens of nanometers and columnar grains with lengths of several micrometers. Moreover, it formed a dense film without cracks or voids, having fewer oxygen deficiencies.
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