Abstract
In this paper, dopant concentration dependent resistive switching characteristics in a SiNx-based resistive random-access memory (RRAM) device are investigated. The device with low dopant concentration (∼1018 cm−3) shows only unipolar switching due to the suppressed reverse current. The result of conduction mechanism analyses for LRS indicates that conducting transport follows the thermionic emission, which has a strong temperature dependence. On the other hand, both unipolar and bipolar switching are observed in the device with high dopant concentration (∼1020 cm−3). It is found that forward current/reverse current (F/R) ratio can be maximized by reducing doping concentration and compliance current (ICC).
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