Abstract
A novel method for the estimation of the temperature distribution in a rapid thermal processing (RTP) system is developed in this paper. The proposed method uses a proper orthogonal decomposition algorithm to extract the dominant modes of the temperature distribution and a reduced-order model is obtained. Then, a reduced-order sliding-mode observer is developed to capture the dynamics of the dominant modes. The estimated dynamics of the dominant modes can be used to reconstruct the temperature distribution. It is proved that the estimation error would be drawn into a small boundary rapidly. Test results confirm the effectiveness of the proposed observer for the RTP system.
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