Abstract

Domain structures and their volume fractions in (0 0 1)-, (1 0 1)- and (1 1 1)-oriented epitaxial Pb(Zr 0.6,Ti 0.4)O 3 (PZT) films grown on (0 0 1), (1 1 0) and (1 1 1) SrTiO 3 (STO) single crystal substrates, respectively, were characterized by using a high resolution X-ray diffraction reciprocal space mapping (RSM) technique. The results of RSM revealed the presence of (1 0 1 ̄ ) and (1 1 1 ̄ ) orientation as well as (1 1 0) and (1 1 1) orientations for the films grown on (1 1 0) and (1 1 1) STO substrates, respectively, although (0 0 1)-oriented film had (0 0 1)-oriented simple domain structure. These multiple domain configurations seemed to be introduced by {1 0 0} and {1 0 1} twin domain boundaries. The RSM analysis also showed that the relative volume fractions of (1 0 1 ̄ ) and (1 1 1 ̄ ) orientations were 22% and 52% against (1 1 0) and (1 1 1) orientations, respectively.

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