Abstract
Epitaxial Pb(ZrxTi1-x)O3 (x=0.0∼0.32) thin films were successfully grown on MgO(001) single crystal by RF magnetron sputtering. Lattice constants and crystal quality of the films were measured by the X-ray θ-2θ scan and the FWHM of (001) rocking curves, respectively. Degree of c axis orientation and crystal quality of the films improved gradually with increasing Zr concentration. High temperature X-ray technique was employed to study the domain formation as a function of temperature during cooling from cubic phase to tetragonal phase. The initial values of α at the Curie temperature also increased with increasing Zr concentration.
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