Abstract
A new integration technique of Deoxyribonucleic acid (DNA) origami as an excellent platform to arrange various nanomaterials such as metallic nanoparticles, carbon nanotubes and proteins and so on with nanometer scale resolution into MEMS utilizing DNA hybridization of a complementary pair of single-strand DNAs (ssDNAs) was demonstrated. A contact-mode atomic force microscopy (AFM) based lithography was adopted to form ssDNA modified patterns into an organic thin film with 30 nm resolution on a silicon substrate. A newly designed DNA origami (30 nm × 150 nm) with ssDNA as sticky ends was successfully fixed at specific positions of the substrate by DNA hybridization.
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