Abstract
To synthesize good diamond-like carbon (DLC) films on the inner surface of a cylinder, <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$hboxC_2hboxH_2$</tex> plasma should be generated uniformly in the cylinder. In this study, glow discharge <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$hboxC_2hboxH_2$</tex> plasma was generated by a high pulsed bias voltage applied on the cylinder, and ions were accelerated and implanted into the sample by the same bias. The effect of pulse frequency of the bias and working pressure on the discharge characteristics was investigated. In addition, the ball-on-disk test and Raman spectroscopy were used to characterize the as-deposited DLC films. The test results show that wear resistance of samples increases with the applied voltage, and the friction coefficient of DLC films lies in the range of 0.15–0.20.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
