Abstract
The factors affecting beam divergence are studied, for planar and concave source electrodes emitting high-intensity ion beams in which the effect of space charges cannot be neglected. The dominant factors are the radius of curvature of the source electrode and the effects of space charges and the extraction electrodes. The measured optimum beam divergences were within ± 1° of the beam axis at the half-maximum beam profiles. Analyzed currents of 4.6 mA for argon (at 45 keV) and 2.1 mA for arsenic (at 40 keV) were obtained.
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