Disturbance Feedback System with PID Control and Disturbance Observer for Spectroscopic Measurement Device

Abstract

AbstractIn recent years, a measurement method for analyzing the spectral property of object using phase variable filter is developed. Then, value of the interferogram fluctuates by influence of disturbance. In this case, the correct spectral characteristics cannot be acquired. In this paper, our method estimates the disturbance input to phase variable filter based on the disturbance observer, and then control the motion of the movable mirror of the phase variable filter by controlling the piezo actuator. Through experiments, we show the validity of our proposed method.