Distribution and Solubility Limit of Al in Al2O3-Doped ZnO Sintered Body

Abstract

A few mol% Al2O3-doped ZnO sintered body forms a substitutional solid solution and the semi-conducting property is drastically affected by the content of the dissolved Al. It was suggested from the results of XRD and EPMA that Al existed in the ZnO sintered body in the form of ZnAl2O4. Furthermore, the distribution of ZnAl2O4 was visualized by AFM and SEM. It was, however, difficult for these techniques to detect dissolved Al in ZnO grains directly. The SIMS mapping suggested that the trace amount of Al (approximately 0.3 atomic%) dissolved into ZnO grains because of high sensitivity for trace impurities. This result was consistent with the change in lattice constants of ZnO with Al dissolution.